Summary : Cameca - XPWS 301 Proximity Step and Repeat System :1980-84 - Thompson’s x-ray spin-off.
Cameca was a European based attempt from the research department of Thomson CSF ...
Cameca - 600 Series Steppers :1980-84
TEL's Clean Track Photoresist Processing System
The history of semiconductor research at Intel is discussed in this 2004 convers ...
Significant improvement in manufacturing worthiness for the first Step-and-Scan ...
Introducing Micrascan III+ for Critical Level Lithography
What the cutting edge of etching looked like in 1980
Not the first such system, but near the first.
The SET's Answer To Your Photoresist Coating Problems
Solitec's commitment to quality automation delivers results
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