Canon - FPA-3000 EX4 Aligner

Canon - PLA 501F/FA Pro ...

30 Jun 1975

Proximity aligners were a bridge tool between the original contact aligners and projection aligners. Yield from contact aligners was extremely low, mainly because the mask was just a stencil laying over the pho ... See more

Canon - Various models ...

Canon - Various models of Mask Aligners :1980-84 - The only company to offer all 3 types of litho tools. ... See more

Canon - FPA-5000 ES2 Al ...

Canon - FPA-5000 ES2 Aligner :1990s - An early DUV scanner. ... See more

Canon - Model FPA141 Pr ...

30 Jun 1985

Though not as elegantly encased as the Perkin-Elmer 100, here was Japan’s answer to the threatening storms of the projection aligner revolution. ... See more

Nikon - NSR-1505G2A ste ...

The NSR-1505G2A is equipped with a new higher-resolution reduction projection lens that has a greater numeral aperture (N.A. = 0.35) ... See more

GCA - The Mann 3600 Pho ...

30 Jun 1975

Here is the Mann and the man that together started two revolutions in the semiconductor capital equipment industry. ... See more

Genus - 1510 MeV Ion Im ...

30 Jun 1985

High-energy ion implanters, typically in the range of 1 to 3 MEV, were originally looked at in the late seventies but were never too successful. ... See more

Verteq - Ultraclean Hig ...

Verteq - Ultraclean High Purity Megasonic System offers the same superior cleaning performance and ease of use as standard megasonic cleaning systems, plus an exclusive polished quartz transduser panel ... See more

Tazmo - Spin Coater TR6 ...

Tazmo - Spin Coater TR6000 and TR5000 Series ... See more

Dawn of the CD SEM

18 Jun 1985

The Dawn of the CD SEM came with Hitachi’s (now Hitachi High-Technologies) add-on accessory, the Model EP-1035. This “accessory” was the first step on the way to Hitachi’s revolutionary S6000. Which wou ... See more