Summary : Technology, Circa 1991 – As lithography moved into ever lower k factors, the concept of Phase Shifting the light, pioneered my Mark Levinsion at IBM, led to phase shift mask.
Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconducto ...
This technical paper laid out the future of yield management, covering all the i ...
KLA's Reticle Inspection System was the first automatic inspection system to ens ...
The tool that sparked the yield management revolution.
Technology, Circa 1981 – It's often the overlooked news that turn out to be cr ...
The dawn of automated inspection. KLA's mask inspection tools took over to see w ...
Takeda Riken, the antecedent to Advantest, was hardly known outside Japan in 198 ...
The 8251 single cassette, horizontal, on-center clean machine features the high ...
In this segment, Wilf Corrigan details the structural ingredients of the ASIC se ...
Paul Otellini was the first to pass from the semiconductor industry’s second g ...
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