Sumitomo Heavy Industries - Aurora X-ray SR Ring

Summary : A precursor to the excimer laser. But it was solely for X-ray wavelengths. It was an essential part of the infrastructure developed for a Next Generation Lithography technology that never materialized for other reasons.

Sumitomo Heavy Industries - Aurora X-ray SR Ring


Sumitomo Heavy Industries - Aurora X-ray SR Ring


Sumitomo Heavy Industries - Aurora X-ray SR Ring


Sumitomo Heavy Industries - Aurora X-ray SR Ring

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