Summary : CONVAC Module 6000 Series photo-lithographic process equipment meets the most stringent requirements of the submicron technology 1 Mega, 4 Mega, 16 Mega, 64 Mega
CONVAC Photo mask processing equipment
The APTCON 3000 is a modular spin processing system designed by APT and CONVAC, ...
CONVAC compact equipment is derived from fully developed components of Module 20 ...
In 1968, standard clean room practices were lax. Facilities were kept reasonably ...
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