Summary : Microlite 150 Series Photostabilizer Systems provide a clean one-step process for hardening of photoresists at high production throughput.
The 200PCU Photostabilizer utilizes the standard dual unicassette wafer handling ...
Gemini-The Platform of Excellence for Photoresist Processing
Dual Chamber Photostabilizer
Today the company is known as Verigy and they are considered a powerhouse of sem ...
Applied Materials - AME 8100 Batch Etcher :1980-84 - The blockbuster that remapp ...
Tetsuo (Tom) Tsuneishi for providing the strategic vision behind Tokyo Electronâ ...
Bill Tobey on his 2006 Bob Graham Award and Lessons Learned
Possibly the only successful high pressure system.
Applied Materials - CA-800 Mask Aligner and Exposure System: :1980-84
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