Paradigms of Maskless Lithography, IEEE Lithography Workshop: 1999

Summary : The replacement of optical lithography with e-beam direct write for semiconductor manufacturing has been predicted since Gordon Moore penned his 1965 paper, writing "It is worth noting that this density of components can be achieved by present optical techniques and does not require the more exotic electron beam operations which are being studied for the possibility of making even smaller structures." This paper showed why it never happened.

IEEE Lithography Workshop - Historical Prespective

IEEE Lithography Workshop - Historical Prespective E-Beam

IEEE Lithography Workshop - Economics of Direct Write

IEEE Lithography Workshop - 1974-2004 History & Forcast

IEEE Lithography Workshop - Economics of Direct Write E-beam Mythology

IEEE Lithography Workshop - Economics of Direct Write Data Complxity

IEEE Lithography Workshop - Economics of Direct Write Computional Requirements

IEEE Lithography Workshop - Economics of Direct Write in 1999

IEEE Lithography Workshop - Economics of Direct Write in 2005

IEEE Lithography Workshop - Economics of Direct Write E-Beam

IEEE Lithography Workshop - Practical & Cultural Barriers

IEEE Lithography Workshop - Practical & Cultural Barriers Fear

IEEE Lithography Workshop - Practical & Cultural Barriers Yield

IEEE Lithography Workshop - Practical & Cultural Barriers There's Lots of Competition

IEEE Lithography Workshop - Practical & Cultural Barriers Optical Lithography's History

IEEE Lithography Workshop - Practical & Cultural Barriers Optical Lithography's Future

IEEE Lithography Workshop - Concludions Next Generation Lithography

The Transistor and the ...

30 Jun 1955

The Invention of the Transistor and the Birth of the Information Age. Michael Riordan, co-author of Crystal Fire, discusses how it came to be. ... See more

Tencor at 20 Years

Tencor (later evolved to be KLA - Tencor) is in the bedrock of the semiconductor equipment industry. It developed many products that were essential to chip manufacturing. Some are still made today. ... See more

John Bardeen and Transi ...

25 Apr 2007

John Bardeen and Transistor Physics by Howard R. Huff, International SEMATECH ... See more

40 Years Of Moore's Law

06 Jun 2005

Historical perspective on Moore’s Law and its affects on everyday life and economic growth for the world as a whole from the fruits brought by semiconductor technology through a 2005 lens. ... See more

When the death of Moore ...

15 Jan 1996

Crashing into Moore's Wall is like a conspiracy theory: it can never be disproved to the true believers that our industry is about to run into a wall that has never appeared. Back in the mid-nineties, Scientifi ... See more

Moore's Law: Its Death ...

01 Oct 2003

Its Death Has Been Greatly Over-Exaggerated - ISSM 2003 Keynote Presentation ... See more

Silicon and the Microel ...

The emergence of crystalline silicon and silicon-based material such as silicon-germanium as the premier material and the personnel driving the integrated circuit (IC) microelectronics revolution will be review ... See more

Intel Timeline from 196 ...

A special presentation of The Chip History Center on Intel Timeline from 1968-1984 ... See more

Introduction to Assembl ...

Assembly equipment consists of those types of equipment used to separate the completed wafer into its individual dice and to assemble each die into its own package. The assembly equipment market comprises roug ... See more

Material Handling Syste ...

Material handling equipment serves as a physical, mechanical and electronic interface between test equipment and the device under test (DUT). It consists of three major subsegments commonly referred to as wafer ... See more