Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. ...
A Presentation Draft of The First Wafer Fab Cost Optimization Model1980
One of the most celebrated companies in the equipment industry, Lam was once a s ...
Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...
IBM’s EL-1: a milestone in e-beam lithography
Applied Materials’ Producer marked an important turning point in the history o ...
The cleanroom was invented in the early 1960s by Willis Whitfield, while working ...
All technology revolutions are not so easy. other than in 20:20 hindsight. The i ...
Also known as DPT, or dual pattern technology, for exposing semiconductor wafers ...
Silicon mythology has it that node progression is predictable and constant. In r ...
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