1983 The Quality Revolution Starts

Lam Research’s AutoEtch 480 was a landmark in the history of plasma etchers. ...

A Presentation Draft of The First Wafer Fab Cost Optimization Model1980

One of the most celebrated companies in the equipment industry, Lam was once a s ...

Nat was one of the prime movers of EUV and without his perseverance, EUV may ne ...

The cleanroom was invented in the early 1960s by Willis Whitfield, while working ...

The transition from aluminum to copper wiring in semiconductor process technolog ...

All technology revolutions are not so easy. other than in 20:20 hindsight. The i ...

IBM is using 1X x-ray lithography to expose the gate level of 0.15 micron PowerP ...

Also known as DPT, or dual pattern technology, for exposing semiconductor wafers ...

Silicon mythology has it that node progression is predictable and constant. In r ...