Back in 2003, it looked like Lithography Enhancing Technologies for reticles and wafers using techniques like dog-bone tricks, hard masks, etchers, etc. were running out of steam. Would Moore’s Law finally come to an end? In this historic video from 2003, Lithography experts, Bill Arnold, Gene Fuller, and Phil Ware discuss the issue.
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Lithography Panel Q&A with Bill Arnold, Gene Fuller, and Phil Ware.
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Phil Ware and his views about the future of semiconductor lithography in 2003.
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