Summary : Transistors to Integrated Circuits: How the early semiconductor industry got from the Lab to the Fab.
Courtesy of The American Institute of Physics
CP683, Characterization and Metrology for ULSI Technology: 2003 International Conference,
edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, S. Zollner, R. P. Khosla,
and E. M. Secula. © 2003 American Institute of Physics
Reprinted with permission from American Institute of Physics
Annexure :
Transistors to Integrated Circuits: How the early semiconductor industry got from the Lab to the Fab.
