The elegant simplicity of this small machine belies the fact that an earlier ancestor was the granddaddy of all modern semiconductor automation. Back then the idea of an automatic step-test-and-repeat wafer prober in three dimensions with five degrees of freedom was still somewhat alien to the manually oriented job-shop approach of most fab lines. But it’s true, Electroglas started it all.
This more recent late-comer can be embellished with a Rucker & Kolls fixed point probe card, another landmark in its own right.
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- Key Contributors: Art Lasch received the SEMI Award in 1986 as recognition of his unique contribution to automation in the industry. Other contributors to Be Recognized.
- Industry code: 1343.4
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