Summary : Sanchali Bhattacharjee & Dalia Vernikovsky - All Star 2019: For tireless efforts to raise the visibility of the role subsystems and components play in yield
Sanchali Bhattacharjee & Dalia Vernikovsky — All Star 2019: For tireless efforts to raise the visibility of the role subsystems and components play in yield
- They have been the driving force behind SEMI’s SCIS (Semiconductor Components, Instruments, and Subsystems) Special Interest Group that focuses on:
- Identifying critical defectivity parameters
- In components such as seals, filters, mass flow controllers, valves, sensors, shower heads, ion beam sources, etc.
- Creating standards for common test methods to measure these parameters, improve traceability, and speed root cause analysis of excursions
- Identifying critical defectivity parameters
