Proximity aligners were a bridge tool between the original contact aligners and projection aligners. Yield from contact aligners was extremely low, mainly because the mask was just a stencil laying over the photoresist. It would smear and scratch the resist when in contact and then pull off some of the resist upon being removed. Proximity aligners would position the mask about 5 microns above the resist—i.e. in proximity. This was quite a feat in its day, requiring alignment through six degrees of freedom while holding mask flatness even tighter.
The Canon PLA 501F/FA was one of these old line masters, not the first, by any means, but one of the best and certainly the most long-lasting. It was still around long after the others had died out.
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