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Here is the machine that changed the industry. Numerous companies had been trying unsuccessfully to create a true multi-process platform system that could perform several processes in sequence. This was the first successful system to actually accomplish
that function well enough to be placed into manufacturing. It was designed as a four-chamber platform system with auto ports at each chamber and a robotic arm transferring each wafer between chambers and wafer load/unload.
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Industry code: 1463.32 |
© 1987 by Applied
Materials |
Mfr’s Code: AMAT |