Novellus Concept One Dielectric CVD System

Novellus Concept One Dielectric CVD System

This photo shows a descendant of the first Concept One, almost a decade after its original development as a conventional CVD system. Teos proved to be decidedly difficult to implement. While not the first, Novellus was among the first to be successful with this new Concept.
 

 

 

 

 

 

 


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Key Contributors: To Be Recognized.

Industry code: 1463.324

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Mfr’s Code: NVS