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Accelerators Inc was one of the three or four early implementers of ion implanters. The company was acquired by Veeco in the mid seventies. This unit was particularly interesting. It sported the enormous beam current of 10 to 75 microamperes with energies ranging from 40 to 400 KV. It could process 2 inch, 3 inch or 4 inch wafers! If that sounds quaint by today’s standards, just remember, it was one the three or four leaders of the day.
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